Design and Fabrication of Electrostatically Formed Nanowire Gas Sensors With Integrated Heaters
Author:
Affiliation:
1. Department of Physical Electronics, School of Electrical Engineering, Tel Aviv University, Ramat Aviv, Tel Aviv, Israel
2. Division of Research and Development, TowerJazz Semiconductor Ltd., Migdal HaEmek, Israel
Funder
Grant from the Office of Naval Research, USA
Israel Innovation Authority Grant
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
http://xplorestaging.ieee.org/ielx7/84/9785947/09759521.pdf?arnumber=9759521
Reference26 articles.
1. Dual-Gate Field-Effect Transistor Hydrogen Gas Sensor with Thermal Compensation
2. Molybdenum Microheaters for MEMS-Based Gas Sensor Applications: Fabrication, Electro-Thermo-Mechanical and Response Characterization
3. Design and simulation of resistive SOI CMOS micro-heaters for high temperature gas sensors
4. Multi-field simulations and characterization of CMOS-MEMS high-temperature smart gas sensors based on SOI technology
5. An integrated low-power thin-film CO gas sensor on silicon
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