Design and Fabrication of Electrostatically Formed Nanowire Gas Sensors With Integrated Heaters
Author:
Affiliation:
1. Department of Physical Electronics, School of Electrical Engineering, Tel Aviv University, Ramat Aviv, Tel Aviv, Israel
2. Division of Research and Development, TowerJazz Semiconductor Ltd., Migdal HaEmek, Israel
Funder
Grant from the Office of Naval Research, USA
Israel Innovation Authority Grant
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
http://xplorestaging.ieee.org/ielx7/84/9785947/09759521.pdf?arnumber=9759521
Reference26 articles.
1. Dual-Gate Field-Effect Transistor Hydrogen Gas Sensor with Thermal Compensation
2. Molybdenum Microheaters for MEMS-Based Gas Sensor Applications: Fabrication, Electro-Thermo-Mechanical and Response Characterization
3. Design and simulation of resistive SOI CMOS micro-heaters for high temperature gas sensors
4. Multi-field simulations and characterization of CMOS-MEMS high-temperature smart gas sensors based on SOI technology
5. An integrated low-power thin-film CO gas sensor on silicon
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Electrostatically formed nanowire (EFN) transistor—An ultrasensitive VOC and gas sensor;Applied Physics Reviews;2024-02-07
2. Recent Progress of Exhaled Gas‐Based Diagnosis Based on Field Effect Transistor Sensors;Advanced Functional Materials;2024-01-26
3. Design and modeling of the electrostatically controlled nanowire FET for ppt-level hydrogen sensing;Journal of Physics D: Applied Physics;2023-10-12
4. Hydrogen Induced Dipole Layer in Pd-SiO2 Based Gas Sensors;2022 IEEE Sensors Applications Symposium (SAS);2022-08-01
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3