Multi-field simulations and characterization of CMOS-MEMS high-temperature smart gas sensors based on SOI technology-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Multi-field simulations and characterization of CMOS-MEMS high-temperature smart gas sensors based on SOI technology

Published:2008-05-28 Issue:7 Volume:18 Page:075010
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Lu Chih-Cheng,Liao Kuan-Hsun,Udrea F,Covington J A,Gardner J W

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference35 articles.

1. The Si planar pellistor: a low-power pellistor sensor in Si thin-film technology

2. Thermal modelling and characterisation of micropower chemoresistive silicon sensors

3. A hydrogen−sensitive MOS field−effect transistor

Cited by 16 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Enhancing the Performance of the Photonic Integrated Sensing System by Applying Frequency Interrogation;Nanomaterials;2023-01-01

2. Au Wire Ball Welding and Its Reliability Test for High-Temperature Environment;Micromachines;2022-09-27

3. Design and simulation of a gas sensitive junctionless FinFET based on conducting polymer as the gate material;Physica Scripta;2022-06-07

4. Thermo-reliability of PVD Cr/Au on sapphire substrates for high-temperature sensors;AIP Advances;2022-06-01

5. Design and Fabrication of Electrostatically Formed Nanowire Gas Sensors With Integrated Heaters;Journal of Microelectromechanical Systems;2022-06

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3