Evaluation on Semiconductor Manufacturing Reconfiguration and Production Based on Scheduling Integrated Optimization Algorithm
Author:
Affiliation:
1. Binghamton University,Wiesthal,New York,USA,13850
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10402119/10402128/10402132.pdf?arnumber=10402132
Reference20 articles.
1. A Deep Convolutional Autoencoder-Based Approach for Anomaly Detection With Industrial, Non-Images, 2-Dimensional Data: A Semiconductor Manufacturing Case Study
2. Research on multi-objective reentrant scheduling for semiconductor workshops [J];Guangyu,2023
3. A Methodology for Efficient Dynamic Spatial Sampling and Reconstruction of Wafer Profiles
4. An Autoencoder-Based Approach for Fault Detection in Multi-Stage Manufacturing: A Sputter Deposition and Rapid Thermal Processing Case Study
5. Reconstructing the three-dimensional latent image of extreme ultraviolet resists with resonant soft x-ray scattering
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