Reconstructing the three-dimensional latent image of extreme ultraviolet resists with resonant soft x-ray scattering-Reference-Cited by-同舟云学术

Reconstructing the three-dimensional latent image of extreme ultraviolet resists with resonant soft x-ray scattering

Published:2019-05-03 Issue:02 Volume:18 Page:1
ISSN:1932-5150
Container-title:Journal of Micro/Nanolithography, MEMS, and MOEMS
language:
Short-container-title:J. Micro/Nanolith. MEMS MOEMS

Author:

Freychet Guillaume¹,Cordova Isvar A.¹,McAfee Terry¹,Kumar Dinesh¹,Pandolfi Ronald J.¹,Anderson Chris²,Dhuey Scott D.³,Naulleau Patrick²

Affiliation:

1. Lawrence Berkeley National Laboratory, Berkeley, California

2. Center for X-Ray Optics, Lawrence Berkeley National Laboratory, Berkeley, California

3. Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, California

Publisher

SPIE-Intl Soc Optical Eng

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference20 articles.

1. Fundamental limits of optical critical dimension metrology: a simulation study

2. Gaps analysis for CD metrology beyond the 22nm node

3. International roadmap for devices and systems 2016

4. Small angle x-ray scattering metrology for sidewall angle and cross section of nanometer scale line gratings

5. Determining the shape and periodicity of nanostructures using small-angle X-ray scattering

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