A Deep Convolutional Autoencoder-Based Approach for Anomaly Detection With Industrial, Non-Images, 2-Dimensional Data: A Semiconductor Manufacturing Case Study
Author:
Affiliation:
1. Department of Information Engineering, University of Padua, Padua, Italy
2. Department of Information Engineering and the Human-Inspired Technology Research Center, University of Padua, Padua, Italy
Funder
Italian Minister for Education (MIUR) under the initiative “Departments of Excellence”
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Control and Systems Engineering
Link
http://xplorestaging.ieee.org/ielx7/8856/9814439/09684242.pdf?arnumber=9684242
Reference56 articles.
1. PyOD: A Python toolbox for scalable outlier detection;zhao;J Mach Learn Res,2019
2. Outlier Detection in Axis-Parallel Subspaces of High Dimensional Data
3. Histogram-based outlier score (HBOS): A fast unsupervised anomaly detection algorithm;goldstein;Proc KI Poster Demo Track,2012
4. Discovering cluster-based local outliers
5. Isolation Forest
Cited by 18 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. The Role of Anomaly Detection in Industry 4.0: A Survey of Techniques and Applications;Journal of Trends in Computer Science and Smart Technology;2024-06
2. Convolutional neural network based multi-input multi-output model for multi-sensor multivariate virtual metrology in semiconductor manufacturing;Annals of Operations Research;2024-03-16
3. Graph Continual Learning Network: An Incremental Intelligent Diagnosis Method of Machines for New Fault Detection;IEEE Transactions on Automation Science and Engineering;2024
4. Ultra-Lightweight Fast Anomaly Detectors for Industrial Applications;Sensors;2023-12-27
5. Evaluation on Semiconductor Manufacturing Reconfiguration and Production Based on Scheduling Integrated Optimization Algorithm;2023 IEEE 15th International Conference on Computational Intelligence and Communication Networks (CICN);2023-12-22
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3