Development of 300 mm TSV interposer with redistribution layers on both sides using MEMS processes

Author:

Yoshimi Seiichi,Fujimoto Koji,Akazawa Miyuki,Matsumoto Hidenobu,Mawatari Hiroshi,Suzuki Kousuke,Itoh Toshihiro,Maeda Ryutaro

Publisher

IEEE

Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. High Frequency Characteristics of Glass Interposer;2020 IEEE 70th Electronic Components and Technology Conference (ECTC);2020-06

2. Microsystems using three-dimensional integration and TSV technologies: Fundamentals and applications;Microelectronic Engineering;2019-04

3. Porous Anodic Aluminum Oxide Interposer: Fabrication, Characterization, and Evaluation;ECS Journal of Solid State Science and Technology;2019

4. Design and analysis of High impedance surface modified 3D antennas;CSI Transactions on ICT;2018-05-24

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