Developing MEMS Electric Current Sensors for End-use Monitoring of Power Supply: Part XIII - Analytical Study on Thermoelastic Damping for Structural Optimization Applicable to Resonant Galvanometers-Reference-Cited by-同舟云学术

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Developing MEMS Electric Current Sensors for End-use Monitoring of Power Supply: Part XIII - Analytical Study on Thermoelastic Damping for Structural Optimization Applicable to Resonant Galvanometers

Published:2024-06-02 Issue: Volume: Page:1-5
ISSN:
Container-title:2024 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)
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Author:

Fang Yifan¹,Han Hongxiang¹,Wang Xinyu¹,Ding Gai¹,Ouyang Kainan¹,Qu Song¹,Wang Dong F.¹,Ono Takahito²,Itoh Toshihiro³

Affiliation:

1. School of Mechanical and Aerospace Engineering, Jilin University,Micro Engineering and Micro Systems Laboratory (JML),Changchun,CHINA,130022

2. Tohoku University,Department of Mechanical Systems Engineering,Sendai,JAPAN,980-8579

3. AIST,Research Center for Ubiquitous MEMS and Micro Engineering,Tsukuba,JAPAN,305-8564

Funder

National Natural Science Foundation of China (NSFC)

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx8/10613004/10613044/10613195.pdf?arnumber=10613195

Reference33 articles.

1. Quality factors in micron- and submicron-thick cantilevers

2. Squeeze film air damping in MEMS

3. An analytical model for support loss in micromachined beam resonators with in-plane flexural vibrations

4. Surface loss simulations of superconducting coplanar waveguide resonators

5. High quality factor nanocrystalline diamond micromechanical resonators limited by thermoelastic damping

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