An analytical model for support loss in micromachined beam resonators with in-plane flexural vibrations-Reference-Cited by-同舟云学术

An analytical model for support loss in micromachined beam resonators with in-plane flexural vibrations

Published:2003-12 Issue:1-2 Volume:109 Page:156-164
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Hao Zhili,Erbil Ahmet,Ayazi Farrokh

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference22 articles.

1. Resonant Silicon Sensors;Stemme;J. Micromech. Microeng.,1991

2. Micro resonant force gauges;Tilmans;Sens. Actuators A,1992

3. Modelling and optimization of micromachined silicon resonators;Beeby;J. Micromech. Microeng.,1995

4. Energy dissipation in submicrometer thick single-crystal silicon cantilevers;Yang;J. Microelectromech. Syst.,2002

5. S.Y. No, A. Hashimura, S. Pourkamali, F. Ayazi, Single-Crystal Silicon HARPSS Capacitive Resonators with Submicron Gap-Spacing, Tech. Dig. Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head, SC, June 2002, pp. 281–284.

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