High quality factor nanocrystalline diamond micromechanical resonators limited by thermoelastic damping
Author:
Funder
DARPA
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4871803
Reference45 articles.
1. An integrated CMOS micromechanical resonator high-Q oscillator
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