MEMS Oscillators for High Volume Commercial Applications-Reference-Cited by-同舟云学术

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MEMS Oscillators for High Volume Commercial Applications

Published:2007-06 Issue: Volume: Page:
ISSN:
Container-title:TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference
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Author:

Lutz M.,Partridge A.,Gupta P.,Buchan N.,Klaassen E.,McDonald J.,Petersen K.

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx5/4300055/4300056/04300068.pdf?arnumber=4300068

Cited by 51 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Ultra-High Q Self-Ovenized AlScN-on-Si X-Lamé Resonator for Stable Clock Generation;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21

2. Self-excited MEMS Oscillator using an Electrostatic Cantilever;IEEJ Transactions on Sensors and Micromachines;2023-04-01

3. Concepts and Key Technologies of Microelectromechanical Systems Resonators;Micromachines;2022-12-11

4. Programmable Oscillator Implementation Using 2.5 GHz Mirror-encapsulated BAW Resonator to Achieve $\pm 20$ PPM Overall Stability;2022 IEEE International Ultrasonics Symposium (IUS);2022-10-10

5. Vibration Mode Suppression in Micromechanical Resonators Using Embedded Anti- Resonating Structures;Journal of Microelectromechanical Systems;2021-02

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