High-Performing Polycrystalline MoS<sub>2</sub>-Based Microelectromechanical Piezoresistive Pressure Sensor-Reference-Cited by-同舟云学术

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High-Performing Polycrystalline MoS₂-Based Microelectromechanical Piezoresistive Pressure Sensor

Published:2022-10-01 Issue:19 Volume:22 Page:18542-18549
ISSN:1530-437X
Container-title:IEEE Sensors Journal
language:
Short-container-title:IEEE Sensors J.

Author:

Rana Vaibhav¹^ORCID,Gangwar Pratisha²,Ramesh Akhil K.¹^ORCID,Sharma Tarun³^ORCID,Bhat K. N.⁴,Nayak M. M.⁴,Das Samaresh¹,Singh Pushpapraj¹

Affiliation:

1. Center of Applied Research in Electronics (CARE), Indian Institute of Technology (IIT) Delhi, New Delhi, India

2. Department of Physics, Indian Institute of Technology (IIT) Delhi, New Delhi, India

3. University Institute of Technology, Himachal Pradesh University, Shimla, Himachal Pradesh, India

4. Centre for Nano Science and Engineering (CeNSE), Indian Institute of Science (IISc), Bangalore, Bengaluru, India

Funder

Ministry of Education, India (MoE, Government of India) through the Grand Challenge Project

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Instrumentation

Link

http://xplorestaging.ieee.org/ielx7/7361/9906561/09863737.pdf?arnumber=9863737

Reference29 articles.

1. Plastic-scale-model assembly of ultrathin film MEMS piezoresistive strain sensor with conventional vacuum-suction chip mounter

2. Electronic phase shift measurement for the determination of acoustic wave DOA using single MEMS biomimetic sensor

3. Experimental test on an RC beam equipped with embedded barometric pressure sensors for strains measurement

4. MEMS Technology: A Review

5. Design and applications of MEMS flow sensors: A review

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Sensitive determination of mechanical and thermal properties of MoS2 multilayers using microcantilevers;Sensors and Actuators A: Physical;2024-09

2. MEMS Pressure Sensor Based on Piezoresistive Effect of MoS₂ Film;2023 IEEE SENSORS;2023-10-29

3. Suspended Two-Dimensional Material Membranes For Sensor Applications Fabricated With A High-Yield Transfer Process;2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS);2023-01-15

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