Suspended Two-Dimensional Material Membranes For Sensor Applications Fabricated With A High-Yield Transfer Process-Reference-Cited by-同舟云学术

Suspended Two-Dimensional Material Membranes For Sensor Applications Fabricated With A High-Yield Transfer Process

Published:2023-01-15 Issue: Volume: Page:
ISSN:
Container-title:2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
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Author:

Lukas Sebastian¹,Kraiem Ines¹,Prechtl Maximilian²,Hartwig Oliver²,Grundmann Annika³,Kalisch Holger³,Kataria Satender¹,Heuken Michael³,Vescan Andrei³,Duesberg Georg S.²,Lemme Max C.¹

Affiliation:

1. RWTH Aachen University,Chair of Electronic Devices,Aachen,Germany,52074

2. University of the Bundeswehr Munich,Institute of Physics, Faculty of Electrical Engineering and Information Technology (EIT 2) and Center for Integrated Sensor Systems,Neubiberg,Germany,85577

3. RWTH Aachen University,Compound Semiconductor Technology,Aachen,Germany,52074

Funder

Ministry of Education

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10052111/10052113/10052595.pdf?arnumber=10052595

Reference21 articles.

1. Realization of a Graphene/PMMA Acoustic Capacitive Sensor Released by Silicon Dioxide Sacrificial Layer

2. Polymer-Assisted Pressure Sensor with Piezoresistive Suspended Graphene and Its Temperature Characteristics

3. Sensitive capacitive pressure sensors based on graphene membrane arrays;šiškins;Microsyst Nanoeng,2020

4. Sensitive Transfer-Free Wafer-Scale Graphene Microphones

5. Metalorganic Vapor-Phase Epitaxy Growth Parameters for Two-Dimensional MoS2

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