Au–Au Bonding-Associated Lapping and Polishing Technique for Sapphire-Based Fabry–Perot Acoustic Sensor Applied for Harsh Environment
Author:
Affiliation:
1. Ministry of Education Key Laboratory of Micro/Nano System for Aerospace, Northwestern Polytechnical University, Xi’an, China
Funder
National Natural Science Foundation of China
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation
Link
http://xplorestaging.ieee.org/ielx7/7361/9906561/09877851.pdf?arnumber=9877851
Reference36 articles.
1. Temporary Bonding and DeBonding Enabling TSV Formation and 3D Integration for Ultra-thin Wafers
2. Temporary Bonding and Debonding - An Update on Materials and Methods
3. Silicon layer transfer using wafer bonding and debonding
4. Miniature photonic-crystal hydrophone optimized for ocean acoustics
5. Handbook of Lapping and Polishing
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