An integration path for gate-first UTB III-V-on-insulator MOSFETs with silicon, using direct wafer bonding and donor wafer recycling

Author:

Czornomaz L.,Daix N.,Caimi D.,Sousa M,Erni R.,Rossell M. D.,El-Kazzi M.,Rossel C.,Marchiori C.,Uccelli E.,Richter M.,Siegwart H.,Fompeyrine J.

Publisher

IEEE

Cited by 17 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

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