Fabrication and Integration of Soc Environment Sensing Hub with Gas/Pressure/Temperature Sensors
Author:
Affiliation:
1. National Tsing Hua University,Dept. of Power Mech. Eng.,Hsinchu City,Taiwan
2. National Tsing Hua University,Dept. of Materials Science and Eng,Hsinchu City,Taiwan
Funder
Ministry of Science and Technology of Taiwan
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9698823/9699435/09699821.pdf?arnumber=9699821
Reference10 articles.
1. CMOS-MEMS Technologies for the Applications of Environment Sensors and Environment Sensing Hubs
2. Nanoflower structures of ZnO–SnO2 arranged on nanoporous Al2O3 for sensing ethanol and methanol gases
3. Monolithic Integration of Pressure/Humidity/Temperature Sensors for CMOS-Mems Environmental Sensing Hub with Structure Designs for Performances Enhancement
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