Monolithic Integration of Humidity/Flow/Temperature Sensors As Environment Sensing Hub for Apparent-Temperature Detection-Reference-Cited by-同舟云学术

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Monolithic Integration of Humidity/Flow/Temperature Sensors As Environment Sensing Hub for Apparent-Temperature Detection

Published:2023-01-15 Issue: Volume: Page:
ISSN:
Container-title:2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
language:
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Author:

Li Yu-Hsuan¹,Chien Tung-Lin²,Shih Fuchi¹,Huang Yuanyuan²,Fang Weileun¹

Affiliation:

1. National Tsing Hua University,Inst. of NanoEng. and MicroSyst.,Hsinchu City,Taiwan

2. National Tsing Hua University,Dept. of Power Mech. Eng.,Hsinchu City,Taiwan

Funder

National Science and Technology Council

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10052111/10052113/10052523.pdf?arnumber=10052523

Reference9 articles.

1. Silicon diode temperature sensors—A review of applications

2. An integrated mass flow sensor with on-chip CMOS interface circuitry

3. Parametric study of a polymer-coated fibre-optic humidity sensor

4. Capacitive CMOS Humidity Sensor with Novel Fringe Electrodes and Polyimide-Pillars for Performance Enhancement

5. CMOS-MEMS Technologies for the Applications of Environment Sensors and Environment Sensing Hubs

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Monolithically Integrated Bidirectional Flow Sensor and Stacked Temperature/Humidity Sensor Based on CMOS-Compatible MEMS Technology;IEEE Transactions on Instrumentation and Measurement;2024

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