A Novel Quality Factor Trimming Method for Multi-Ring MEMS Resonators Based on Thermoelastic Dissipation
Author:
Affiliation:
1. Tohoku University,Sendai,JAPAN
Funder
New Energy and Industrial Technology Development Organization (NEDO)
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9698823/9699435/09699522.pdf?arnumber=9699522
Reference15 articles.
1. Disk resonator gyroscope with whole-angle mode operation
2. Rate Integrating Gyroscope Using Independently Controlled CW and CCW Modes on Single Resonator
3. FM/rate integrating MEMS gyroscope using independently controlled CW/CCW mode oscillations on a single resonator
4. Quad Mass Gyroscope with 16 ppm Frequency Mismatch Trimmed by Focus Ion Beam
5. Novel mismatch compensation methods for rate-integrating gyroscopes
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1. Low-Noise Quality Factor Tuning in Nondegenerate MEMS Gyroscope Without Dedicated Tuning Electrode;IEEE Transactions on Industrial Electronics;2024-04
2. Two-axis multiple masses resonator with frequency and Q-factor matching;Sensors and Actuators A: Physical;2024-02
3. Active Quality Factor Stabilization of MEMS Resonator Utilizing Electrical Dissipation Regulation;2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS);2023-01-15
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