An Aluminum Scandium Nitride (Al0.64Sc0.36N) Two-Dimensional-Resonant-Rods Delay Line with 7.5% Bandwidth and 1.8 dB Loss
Author:
Affiliation:
1. Northeastern University, Electrical Engineering,Boston,USA
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9698823/9699435/09699475.pdf?arnumber=9699475
Reference17 articles.
1. Low Loss Acoustic Delay Lines Based on Solidly Mounted Lithium Niobate Thin Film
2. Gigahertz Low-Loss and High Power Handling Acoustic Delay Lines Using Thin-Film Lithium-Niobate-on-Sapphire
3. On the Coupling Coefficient of ScyAl1-yN-based Piezoelectric Acoustic Resonators
4. Investigation on the Impact of Scandium-doping on the kt2 of ScxAl1-xN Cross-sectional Lamé Mode Resonators
5. Al0.68Sc0.32N Lamb wave resonators with electromechanical coupling coefficients near 10.28%
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