Phononic Graded Meta-MEMS for Elastic Wave Amplification and Filtering-Reference-Cited by-同舟云学术

Phononic Graded Meta-MEMS for Elastic Wave Amplification and Filtering

Published:2023-12 Issue:6 Volume:32 Page:522-528
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Maspero Federico¹^ORCID,De Ponti Jacopo Maria²^ORCID,Iorio Luca²^ORCID,Esposito Annachiara³,Bertacco Riccardo¹^ORCID,Matteo Andrea di³,Corigliano Alberto²^ORCID,Ardito Raffaele²^ORCID

Affiliation:

1. Department of Physics, Politecnico di Milano, Milan, Italy

2. Department of Civil and Environmental Engineering, Politecnico di Milano, Milan, Italy

3. STMicroelectronics, Arzano, Italy

Funder

H2020 Future and Emerging Technologies (FET)-Proactive Metamaterial Enabled Vibration Energy Harvesting (MetaVEH) Project

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx7/84/10336244/10281378.pdf?arnumber=10281378

Reference37 articles.

1. A Defect-Based MEMS Phononic Crystal Slab Waveguide

2. On the use of absorbing layers to simulate the propagation of elastic waves in unbounded isotropic media using commercially available Finite Element packages

3. Design, Fabrication and Experimental Validation of a Metaplate for Vibration Isolation in MEMS

4. An Aluminum Scandium Nitride (Al_0.64Sc_0.36N) Two-Dimensional-Resonant-Rods Delay Line with 7.5% Bandwidth and 1.8 dB Loss

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