Improving Thermal Linearity and Quality Factor of Al72Sc28N Contour Mode Resonators Using Acoustic Metamaterials based Lateral Anchors
Author:
Affiliation:
1. Northeastern University,Boston,USA
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9850393/9850436/09850683.pdf?arnumber=9850683
Reference15 articles.
1. Record-High ${K_{T}}^{2}$ Exceeding 7.4% Through Low-Impedance Lithographically Defined Resonant Rods in Aluminum Nitride Thin Plates
2. Aluminum nitride two-dimensional-resonant-rods
3. Slow Waves in Metamaterial Two-Dimensional-Resonant-Rods (2DRRs) Delay Lines
4. A Comparative Study on the Performance of Aluminum Nitride Thickness and quasi-Thickness Extensional Mode Resonators
5. An Ultra-Low Impedance 4.8 GHz Al72Sc28N Resonant Rods Resonator With a Record kt 2 of 21.2%
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1. Multipurpose Acoustic Metamaterial Anchors for Aluminum Scandium Nitride Contour Mode Resonators;Journal of Microelectromechanical Systems;2024-08
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3. 6–20 GHz 30% ScAlN Lateral Field-Excited Cross-Sectional Lamé Mode Resonators for Future Mobile RF Front Ends;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control;2023-10
4. Study of the Performance Enhancement of Sc-Doped AlN Super High Frequency Cross-Sectional Lamé Mode Resonators;Micromachines;2023-02-23
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