High Quality Factor Hybrid SAW/BAW Resonators-Reference-Cited by-同舟云学术

High Quality Factor Hybrid SAW/BAW Resonators

Published:2022-04-24 Issue: Volume: Page:
ISSN:
Container-title:2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS)
language:
Short-container-title:

Author:

Barsoum S.¹,Hellion C.¹,Vermande E.¹,Quemper J.M.¹,Bousquet M.¹,Reinhardt A.¹,Laroche T.²,Ballandras S.²,Dubus B.³

Affiliation:

1. Univ. Grenoble Alpes, CEA-LETI,Grenoble,France

2. frec|n|sys SAS,Besançon,France

3. Univ Lille, CNRS, Ecole Centrale, Junia, Univ Valenciennes, IEMN, UMR 8520,Lille,France

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9850393/9850436/09850764.pdf?arnumber=9850764

Reference5 articles.

1. Design and Fabrication of SAW Resonators on Silicon Substrate Employing Transverse BAW in Patterned ZnO

2. Coupled BAW/SAW Resonators Using AlN/Mo/Si and AlN/Mo/GaN Layered Structures

3. Study on the performances of AlScN based SAW/BAW Hybrid Resonators;lang;Proceedings of the 2021 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS),2021

4. Hybrid BAW/SAW AlN and AlScN thin film resonator

5. 3rd type of FBARs?;plessky;Proceedings of then 2013 IEEE International Ultrasonics Symposium,0

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Impact of Transducer Aspect Ratio on the performance of AlN Hybrid SAW/BAW Resonators;2023 IEEE International Ultrasonics Symposium (IUS);2023-09-03

2. Toward Band n78 Shear Bulk Acoustic Resonators Using Crystalline Y-Cut Lithium Niobate Films With Spurious Suppression;Journal of Microelectromechanical Systems;2023-08

3. Vertical etching of Al_0.7Sc_0.3N for next generation of acoustic wave resonators;2023 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP);2023-05-28