Tilted Interdigital-transducer in NS-SAW Resonator for Transverse Mode Suppression
Author:
Affiliation:
1. Fudan University,School of Information Science and Technology,Shanghai,China
2. Shandong University,Institute of Novel Semiconductors,Jinan,China
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9850393/9850436/09850616.pdf?arnumber=9850616
Reference21 articles.
1. Thin-film lithium niobate-on-insulator (LNOI) shear horizontal surface acoustic wave resonators
2. Improved quality factor of hetero acoustic layer (HAL) SAW resonator combining LiTaO3 thin plate and quartz substrate
3. A High-Performance NS-SAW Resonator Using 30° YX-Lithium Niobate;wu;2022 IEEE International Frequency Control Symposium Joint with the European Frequency and Time forum Paris,2022
4. Transverse Mode Compensation of Surface Acoustic Wave Filters
5. Experimental Studies of Quality Factor Deterioration in Shear-Horizontal-Type Surface Acoustic Wave Resonators Caused by Apodization of Interdigital Transducer
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1. Near 6-GHz Sezawa Mode Surface Acoustic Wave Resonators Using AlScN on SiC;Journal of Microelectromechanical Systems;2024
2. Tilted IDT Designs for Spurious Modes Suppression in LiNbO3/SiO2/Si SAW Resonators;IEEE Transactions on Electron Devices;2023-11
3. Designed Structures of Interdigital Electrodes for Thin Film SAW Devices;Micromachines;2023-10-14
4. A Spurious-Free SAW Resonator With Near-Zero TCF Using LiNbO3/SiO2/quartz;IEEE Electron Device Letters;2023-10
5. Near-Zero TCF and Spurious-Free Wideband SAW Device on LNOI platform;2023 IEEE International Ultrasonics Symposium (IUS);2023-09-03
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