Tilted IDT Designs for Spurious Modes Suppression in LiNbO<sub>3</sub>/SiO<sub>2</sub>/Si SAW Resonators-Reference-Cited by-同舟云学术

Tilted IDT Designs for Spurious Modes Suppression in LiNbO₃/SiO₂/Si SAW Resonators

Published:2023-11 Issue:11 Volume:70 Page:5831-5838
ISSN:0018-9383
Container-title:IEEE Transactions on Electron Devices
language:
Short-container-title:IEEE Trans. Electron Devices

Author:

Wu Shuxian¹^ORCID,Wu Zonglin¹^ORCID,Qian Hangyu¹^ORCID,Li Ming²^ORCID,Bao Feihong¹^ORCID,Tang Gongbin²,Xu Feng¹^ORCID,Zou Jie¹^ORCID

Affiliation:

1. Key Laboratory for Information Science of Electromagnetic Waves, School of Information Science and Technology, Fudan University, Shanghai, China

2. Institute of Novel Semiconductors, Shandong University, Jinan, Shandong, China

Funder

Natural Science Foundation of Shanghai

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Link

http://xplorestaging.ieee.org/ielx7/16/10294316/10239700.pdf?arnumber=10239700

Reference39 articles.

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4. Bringing BAW technology into volume production: The ten commandments and the seven deadly sins;aigner;Proc IEEE Int Symp Acoust Wave Dev Future Mobile Communication Syst,2007

5. Layered SAW Resonators with Near-Zero TCF at Both Resonance and Anti-resonance

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