Abstract
Abstract
This work investigates the design methodology to obtain large electromechanical coupling factor (
k
eff
2
) and high quality factor (Q) of shear-horizontal surface acoustic wave (SH-SAW) resonators based on the thin-film lithium niobate-on-insulator (LNOI) technology. The guided SH wave can be excited through interdigital transducers and propagate at the very surface of the material stackings. Such a guided SH wave in LN/SiO2 double layer structure is expected to offer high
k
eff
2
by confining the elastic strain energy in the piezoelectric thin film. To capture the optimum design window for high-performance LNOI SH-SAW devices, the impact of electrode material and its thickness on the
k
eff
2
dispersive characteristics are intensively investigated by finite element method (FEM). In this study, various one-port resonators with wavelengths from 2.8 μm to 8 μm were fabricated on a LNOI wafer with LN and SiO2 thickness of 0.7 and 2 μm, respectively. The 100 nm thick gold film was chosen as the electrode of the devices, which demonstrate a similar
k
eff
2
dispersive behavior to the FEM simulation with small discrepancy. Among the measurement results over several tested samples, a high-
k
eff
2
of 25.5% and Q of 960 was recorded at a resonance frequency of 581 MHz (FOM =
k
eff
2
⋅
Q
= 245), revealing great potential for the application of wide-band frequency selection in telecommunications.
Funder
Ministry of Science and Technology, Taiwan
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
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