A Fabry-Perot microinterferometer for visible wavelengths
Author:
Publisher
IEEE
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http://xplorestaging.ieee.org/ielx2/609/5914/00228299.pdf?arnumber=228299
Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Bridging the gap: Perspectives of nanofabrication technologies for application-oriented research;Journal of Vacuum Science & Technology B;2021-12
2. A Wafer Level Packaged Fully Integrated Tunable Fabry-Pérot Filter With Extended Optical Range For Multispectral and Hyperspectral Imaging;Journal of Microelectromechanical Systems;2020-06
3. Challenges of nanostructure-integration in Fabry-Pérot interferometers as alternative to Bragg reflectors: an example for Match 1:1-, eBeam-, and nanoimprint lithography;33rd European Mask and Lithography Conference;2017-09-28
4. Large-scale fabrication of LP-CVD Si3N4 photonic crystal structures as freestanding reflectors with 1 mm aperture for Fabry-Pérot interferometers;Nanoengineering: Fabrication, Properties, Optics, and Devices XIV;2017-08-31
5. VIS Fabry-Pérot-Interferometer with (HL)4PE-Si3N4/PE-SiO2reflectors on freestanding LP-Si3N4membranes for surface enhanced Raman spectroscopy;SPIE Proceedings;2016-03-15
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