Challenges of nanostructure-integration in Fabry-Pérot interferometers as alternative to Bragg reflectors: an example for Match 1:1-, eBeam-, and nanoimprint lithography-Reference-Cited by-同舟云学术

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Challenges of nanostructure-integration in Fabry-Pérot interferometers as alternative to Bragg reflectors: an example for Match 1:1-, eBeam-, and nanoimprint lithography

Published:2017-09-28 Issue: Volume: Page:
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Container-title:33rd European Mask and Lithography Conference
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Author:

Helke Christian,Hiller Karla,Erben Jens Wolfram,Reuter Danny,Nowak Christoph,Kleinjans Herbert,Otto Thomas,Meinig Marco,Kurth Steffen

Publisher

SPIE

Reference11 articles.

1. Resolution and speed improvements of mid-infrared Fabry-Perot microspectrometers for the analysis of hydrocarbon gase;Ebermann,2014

2. Dual-band MEMS Fabry-Pérot filter with two movable reflectors for mid- and long-wave infrared microspectrometers.;Meinig,2011

3. Design, characterization and control of a large aperture MOEMS Fabry-Perot tunable infrared filter;Palmer,2006

4. A Fabry-Perot microinterferometer for visible wavelengths;Raley,1992

5. Bulk-micromachined tunable Fabry–Perot microinterferometer for the visible spectral range

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1. Bridging the gap: Perspectives of nanofabrication technologies for application-oriented research;Journal of Vacuum Science & Technology B;2021-12

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