Bridging the gap: Perspectives of nanofabrication technologies for application-oriented research-Reference-Cited by-同舟云学术

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Bridging the gap: Perspectives of nanofabrication technologies for application-oriented research

Published:2021-12 Issue:6 Volume:39 Page:062805
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

Baum Mario¹,Meinecke Christoph²,Blaudeck Thomas¹²³,Helke Christian²,Reuter Danny¹²,Hiller Karla¹²³,Hermann Sascha¹²³,Schulz Stefan E.¹²³,Kuhn Harald¹²

Affiliation:

1. Fraunhofer Institute for Electronic Nano Systems (ENAS), 09126 Chemnitz, Saxony, Germany

2. Center for Microtechnologies (ZfM), Chemnitz University of Technology, 09107 Chemnitz, Saxony, Germany

3. Research Center for Materials, Architectures and Integration of Nanomembranes (MAIN), Chemnitz University of Technology, 09107 Chemnitz, Saxony, Germany

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

https://avs.scitation.org/doi/pdf/10.1116/6.0001299

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Simultaneous occurrence and compensating effects of multi‐type disorder in two‐dimensional photonic structures;Nano Select;2023-04

2. Nanolithographic Fabrication Technologies for Network-Based Biocomputation Devices;Materials;2023-01-24

3. Roadmap for network-based biocomputation;Nano Futures;2022-08-09

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