Sub-100 nm Self-Aligned Top-Gate Amorphous InGaZnO Thin-Film Transistors With Gate Insulator of 4 nm Atomic-Layer-Deposited AlO<sub>x</sub>-Reference-Cited by-同舟云学术

Sub-100 nm Self-Aligned Top-Gate Amorphous InGaZnO Thin-Film Transistors With Gate Insulator of 4 nm Atomic-Layer-Deposited AlO_x

Published:2023-03 Issue:3 Volume:44 Page:444-447
ISSN:0741-3106
Container-title:IEEE Electron Device Letters
language:
Short-container-title:IEEE Electron Device Lett.

Author:

Zhang Yuqing¹^ORCID,Li Jiye²^ORCID,Li Jinxiong³,Huang Tengyan²^ORCID,Guan Yuhang²,Zhang Yuhan²^ORCID,Yang Huan²^ORCID,Chan Mansun¹^ORCID,Wang Xinwei³^ORCID,Lu Lei²^ORCID,Zhang Shengdong²^ORCID

Affiliation:

1. Department of Electronic and Computer Engineering, The Hong Kong University of Science and Technology, Hong Kong, China

2. School of Electronic and Computer Engineering, Peking University, Shenzhen, China

3. School of Advanced Materials, Peking University, Shenzhen, China

Funder

National Key Research and Development Program

Shenzhen Municipal Scientific Program

Innovation and Technology Fund from the Hong Kong Government

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Link

http://xplorestaging.ieee.org/ielx7/55/10053585/10018375.pdf?arnumber=10018375

Reference32 articles.

1. Downscaling Metal—Oxide Thin-Film Transistors to Sub-50 nm in an Exquisite Film-Profile Engineering Approach

2. Scaled Atomic-Layer-Deposited Indium Oxide Nanometer Transistors With Maximum Drain Current Exceeding 2 A/mm at Drain Voltage of 0.7 V

3. Low Thermal Budget (<250 °C) Dual-Gate Amorphous Indium Tungsten Oxide (IWO) Thin-Film Transistor for Monolithic 3-D Integration

4. 30-nm-channel-length c-axis aligned crystalline In-Ga-Zn-O transistors with low off-state leakage current and steep subthreshold characteristics

5. Facile and Stable n+ Doping Process Via Simultaneous Ultraviolet and Thermal Energy for Coplanar ALD-IGZO Thin-Film Transistors

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