Preparation of Titanium-Doped Diamond-Like Carbon Films With Electrical Conductivity Using High Power Pulsed Magnetron Sputtering System With Bipolar Pulse Voltage Source for Substrate-Reference-Cited by-同舟云学术

Preparation of Titanium-Doped Diamond-Like Carbon Films With Electrical Conductivity Using High Power Pulsed Magnetron Sputtering System With Bipolar Pulse Voltage Source for Substrate

Published:2016-12 Issue:12 Volume:44 Page:3083-3090
ISSN:0093-3813
Container-title:IEEE Transactions on Plasma Science
language:
Short-container-title:IEEE Trans. Plasma Sci.

Author:

Kimura Takashi^ORCID,Kamata Hikaru,Nakao Setsuo,Azuma Kingo

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Condensed Matter Physics,Nuclear and High Energy Physics

Link

http://xplorestaging.ieee.org/ielx7/27/7762697/07516630.pdf?arnumber=7516630

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