Direct calorimetric measurements in a PBII and deposition (PBII&D) experiment with a HiPIMS plasma source
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference48 articles.
1. High power impulse magnetron sputtering and related discharges: scalable plasma sources for plasma-based ion implantation and deposition;Anders;Surf. Coat. Technol.,2010
2. High power impulse magnetron sputtering: current-voltage-time characteristics indicate the onset of sustained self-sputtering;Anders;J. Appl. Phys.,2007
3. Ionized physical vapor deposition (IPVD): a review of technology and applications;Helmersson;Thin Solid Films,2006
4. Plasma diagnostics for understanding the plasma- surface interaction in HiPIMS discharges: a review;Britun;J. Phys. D. Appl. Phys.,2014
5. Metal versus rare-gas ion irradiation during Ti1-xAlxN film growth by hybrid high power pulsed magnetron/dc magnetron co-sputtering using synchronized pulsed substrate bias;Greczynski;J. Vac. Sci. Technol. A,2012
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Energetic characterization during plasma electrolytic polishing of cemented tungsten carbide;Journal of Applied Physics;2023-07-19
2. On the correlation between the TiN thin film properties and the energy flux of neutral sputtered atoms in direct current magnetron discharge;Journal of Physics D: Applied Physics;2022-11-03
3. Pretreatment of cutting tools by plasma electrolytic polishing (PEP) for enhanced adhesion of hard coatings;Surface and Coatings Technology;2021-01
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3