Calorimetric probe measurements for a high voltage pulsed substrate (PBII) in a HiPIMS process
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Published:2017-05-22
Issue:6
Volume:26
Page:065013
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ISSN:1361-6595
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Container-title:Plasma Sources Science and Technology
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language:
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Short-container-title:Plasma Sources Sci. Technol.
Author:
Gauter SvenORCID,
Fröhlich Maik,
Garkas Wagdi,
Polak Martin,
Kersten Holger
Subject
Condensed Matter Physics
Cited by
19 articles.
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