The effects of a small transverse magnetic field upon a capacitively coupled RF discharge-Reference-Cited by-同舟云学术

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The effects of a small transverse magnetic field upon a capacitively coupled RF discharge

Published:1995 Issue:4 Volume:23 Page:636-643
ISSN:0093-3813
Container-title:IEEE Transactions on Plasma Science
language:
Short-container-title:IEEE Trans. Plasma Sci.

Author:

Hutchinson D.A.W.,Turner M.M.,Doyle R.A.,Hopkins M.B.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Condensed Matter Physics,Nuclear and High Energy Physics

Link

http://xplorestaging.ieee.org/ielx1/27/9849/00467985.pdf?arnumber=467985

Cited by 41 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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2. Influence of magnetic field gradient on the capacitive argon discharge at 8 MHz and 40 MHz;Plasma Sources Science and Technology;2023-05-01

3. Electron dynamics in planar radio frequency magnetron plasmas: II. Heating and energization mechanisms studied via a 2d3v particle-in-cell/Monte Carlo code;Plasma Sources Science and Technology;2023-04-01

4. Electron dynamics in planar radio frequency magnetron plasmas: I. The mechanism of Hall heating and the µ-mode;Plasma Sources Science and Technology;2023-04-01

5. Influence of magnetic field strength on capacitively coupled CF₄ discharge at different pressures;Plasma Sources Science and Technology;2022-12-01

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