Design and Implementation of a Capacitive-type Microphone with Rigid Diaphragm and Flexible Spring Using the Two Poly Silicon Micromachining Processes
Author:
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation
Link
http://xplorestaging.ieee.org/ielx5/7361/5975325/05721887.pdf?arnumber=5721887
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