MEMS Pressure Sensors Design, Simulation, Manufacturing, Interface Circuits: A Review-Reference-Cited by-同舟云学术

MEMS Pressure Sensors Design, Simulation, Manufacturing, Interface Circuits: A Review

Published:2024-03-15 Issue:6 Volume:24 Page:7395-7405
ISSN:1530-437X
Container-title:IEEE Sensors Journal
language:
Short-container-title:IEEE Sensors J.

Author:

Tulaev Artyom T.¹^ORCID,Kozlov Aleksei S.¹^ORCID,Belyaev Jacob V.¹^ORCID,Loboda Vera V.²^ORCID,Bellavin Mikhail A.²^ORCID,Korotkov Alexander S.²^ORCID

Affiliation:

1. Concern CSRI “Elektropribor,”, St. Petersburg, Russia

2. Higher School of Microelectronics and Micro-Electro-Mechanical Devices, Peter Great St. Petersburg Polytechnic University, St. Petersburg, Russia

Funder

State Assignment for Basic Research

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Link

http://xplorestaging.ieee.org/ielx7/7361/10472410/10418861.pdf?arnumber=10418861

Reference93 articles.

1. Piezoresistance Effect in Germanium and Silicon

2. (Invited) Development of CMOS-MEMS Cointegrated Pressure Sensor Using Minimal Fab Process

3. Review: Semiconductor Piezoresistance for Microsystems

4. Design, Fabrication, and Implementation of an Array-Type MEMS Piezoresistive Intelligent Pressure Sensor System

5. Modeling and FEM-Based Simulations of Composite Membrane Based Circular Capacitive Pressure Sensor

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