Design, Fabrication, and Implementation of an Array-Type MEMS Piezoresistive Intelligent Pressure Sensor System-Reference-Cited by-同舟云学术

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Design, Fabrication, and Implementation of an Array-Type MEMS Piezoresistive Intelligent Pressure Sensor System

Published:2018-02-28 Issue:3 Volume:9 Page:104
ISSN:2072-666X
Container-title:Micromachines
language:en
Short-container-title:Micromachines

Author:

Zhang Jiahong,Chen Jianxiang,Li Min,Ge Yixian,Wang Tingting,Shan Peng,Mao Xiaoli

Publisher

MDPI AG

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering

Link

http://www.mdpi.com/2072-666X/9/3/104/pdf

Reference39 articles.

1. Micromachined pressure sensors: review and recent developments

2. Review: Semiconductor Piezoresistance for Microsystems

3. Design optimization of high pressure and high temperature piezoresistive pressure sensor for high sensitivity

4. A Wireless Pressure Sensor Integrated with a Biodegradable Polymer Stent for Biomedical Applications

5. Research on High-Precision, Low Cost Piezoresistive MEMS-Array Pressure Transmitters Based on Genetic Wavelet Neural Networks for Meteorological Measurements

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