A Low-Temperature-Sensitivity Resonant Pressure Microsensor Based on Eutectic Bonding
Author:
Affiliation:
1. State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing, China
2. Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing, China
Funder
National Key Research and Development Program
Key Technology Team Project of Chinese Academy of Sciences
National Science Fund for Distinguished Young Scholars
National Natural Science Foundation of China and the China Academy of Engineering Physics
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Instrumentation
Link
http://xplorestaging.ieee.org/ielx7/7361/9774386/09749206.pdf?arnumber=9749206
Reference25 articles.
1. Realization of a micro pressure sensor with high sensitivity and overload by introducing beams and Islands
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