A Resonant Pressure Microsensor Optimized by DETF Resonators
Author:
Affiliation:
1. Aerospace Information Research Institute, Chinese Academy of Sciences,State Key Laboratory of Transducer Technology,Beijing,China
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10324456/10324848/10324922.pdf?arnumber=10324922
Reference6 articles.
1. A Micromachined Resonant Low-Pressure Sensor Using an Island-Diaphragm Structure
2. Design and simulation of an aluminum nitride piezoelectric resonant pressure sensor
3. A novel electrode design in DETF with reducing multimode effect;liu;13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS) Singapore SINGAPORE,2018
4. Small Size And Highly Sensitive Differential MEMS Accelerometer Based On Double-Ended Tuning Fork Resonators
5. A Low-Temperature-Sensitivity Resonant Pressure Microsensor Based on Eutectic Bonding
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