EUV lighting by the cold cathode C-beam irradiation technique
Author:
Affiliation:
1. Kyung Hee University,Department of Information Display,Dongdaemun-gu,Seoul,Republic of Korea,02447
Funder
Technology Innovation Program
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10102927/10102928/10102964.pdf?arnumber=10102964
Reference9 articles.
1. Far UVC light for E. coli disinfection generated by carbon nanotube cold cathode and sapphire anode
2. Fully sealed, high-brightness carbon-nanotube field-emission display
3. Sapphire Wafer for 226 nm Far UVC Generation with Carbon Nanotube-Based Cold Cathode Electron Beam (C-Beam) Irradiation
4. Extreme Ultraviolet Lighting Using Carbon Nanotube-Based Cold Cathode Electron Beam
5. Physical processes in EUV sources for microlithography
Cited by 1 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Enhanced EUV Lighting with Focusing Electrode Adapted C-Beam Irradiation Technique;2024 37th International Vacuum Nanoelectronics Conference (IVNC);2024-07-15
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