A Closed-Loop <formula formulatype="inline"> <tex Notation="TeX">$\Sigma\Delta$</tex></formula> Interface for a High-Q Micromechanical Capacitive Accelerometer With 200 ng/<formula formulatype="inline"><tex Notation="TeX">$ \surd$</tex></formula>Hz Input Noise Density-Reference-Cited by-同舟云学术

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A Closed-Loop $\Sigma\Delta$ Interface for a High-Q Micromechanical Capacitive Accelerometer With 200 ng/$ \surd$Hz Input Noise Density

Published:2015-09 Issue:9 Volume:50 Page:2101-2112
ISSN:0018-9200
Container-title:IEEE Journal of Solid-State Circuits
language:
Short-container-title:IEEE J. Solid-State Circuits

Author:

Xu Honglin,Liu Xiaowei,Yin Liang

Funder

National Natural Science Foundation of China

National Hi-Tech Research and Development Program of China (863 Program)

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering

Link

http://xplorestaging.ieee.org/ielx7/4/7226885/07112174.pdf?arnumber=7112174

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2. An Ultralow-Power Triaxial MEMS Accelerometer With High-Voltage Biasing and Electrostatic Mismatch Compensation;IEEE Journal of Solid-State Circuits;2024-07

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4. A 46.6 μg/√Hz Single-Chip Accelerometer Exploiting a DTC-Assisted Chopper Amplifier;IEEE Journal of Solid-State Circuits;2024-02

5. A Nearing-Free Constrained Architecture for Systematic Design of Electromechanical Sigma-Delta Modulator;IEEE Transactions on Circuits and Systems I: Regular Papers;2024

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