An Ultralow-Power Triaxial MEMS Accelerometer With High-Voltage Biasing and Electrostatic Mismatch Compensation-Reference-Cited by-同舟云学术

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An Ultralow-Power Triaxial MEMS Accelerometer With High-Voltage Biasing and Electrostatic Mismatch Compensation

Published:2024-07 Issue:7 Volume:59 Page:2219-2235
ISSN:0018-9200
Container-title:IEEE Journal of Solid-State Circuits
language:
Short-container-title:IEEE J. Solid-State Circuits

Author:

Peng Yimai¹^ORCID,Jeong Seokhyeon¹^ORCID,Choo Kyojin²^ORCID,Kim Yejoong¹^ORCID,Chen Li-Yu¹^ORCID,Rothe Rohit¹^ORCID,Xu Li³^ORCID,Gurin Ilya⁴^ORCID,Oliaei Omid⁴^ORCID,Thompson Matthew J.⁴,Bart Stephen⁴^ORCID,Hartwell Peter⁴^ORCID,Blaauw David¹^ORCID,Sylvester Dennis¹^ORCID

Affiliation:

1. Department of Electrical and Computer Engineering, University of Michigan, Ann Arbor, MI, USA

2. Swiss Federal Institute of Technology Lausanne (EPFL), Lausanne, Switzerland

3. Nvidia Corporation, Santa Clara, CA, USA

4. InvenSense Inc., San Jose, CA, USA

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Link

http://xplorestaging.ieee.org/ielx7/4/10575937/10399788.pdf?arnumber=10399788

Reference33 articles.

1. Mobile Human Airbag System for Fall Protection Using MEMS Sensors and Embedded SVM Classifier

2. Motion Mode Recognition for Indoor Pedestrian Navigation Using Portable Devices

3. Capacitive MEMS Accelerometer With Perforated and Electrically Separated Mass Structure for Low Noise and Low Power

4. A Closed-Loop $\Sigma\Delta$ Interface for a High-Q Micromechanical Capacitive Accelerometer With 200 ng/$ \surd$Hz Input Noise Density

5. A force balance micromachined accelerometer with a self-noise of 1 ng/Hz1/2

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