An Experimental Investigation of Noise Sources’ Contribution in the Multi-Chip Module Open-Loop Comb-Drive Capacitive MEMS Accelerometer

Abstract

The paper presents the noise analysis of a MEMS and ASIC readout integrated circuit (ROIC) constituting the accelerometer developed in the frame of the InnoReh project, aiming at the development of methods for monitoring patients with imbalance disorders. Several experiments were performed at different temperatures and in different configurations: ROIC alone, ROIC with emulated parasitic capacitances, MEMS and ROIC in separate packages, and MEMS and ROIC in a single package. Many noise/interference sources were considered. The results obtained experimentally were compared to the results of theoretical investigations and were within the same order of magnitude, although in practice, the observed noise was always greater than the theoretical estimation. The paper also includes an in-depth analysis to explain these differences. Moreover, it is argued that, in terms of noise, the MEMS sensing element, and not the ROIC, is the quality-limiting factor.