Near Vacuum Gas Damping in MEMS: Numerical Modeling and Experimental Validation
Author:
Funder
STMicroelectronics
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
http://xplorestaging.ieee.org/ielx7/84/7579588/07508460.pdf?arnumber=7508460
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