The Effect of Squeeze-Film Damping on the Step Response of Electrostatic Micro-Actuators
Author:
Affiliation:
1. Unispectral Ltd., Ramat Gan, Israel
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Mechanical Engineering
Link
http://xplorestaging.ieee.org/ielx7/84/10336244/10258437.pdf?arnumber=10258437
Reference38 articles.
1. The Boltzmann Equation and Its Applications
2. Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime
3. On Isothermal Squeeze Films
4. End effects of rare gas flow in short channels and in squeezed-film dampers;veijola;Proc Int Conf Modeling Simulation Microsyst (MSM),2002
5. A Model for Collision Processes in Gases. I. Small Amplitude Processes in Charged and Neutral One-Component Systems
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