Tilt effect on squeeze-film damping in electrostatic micro-actuators-Reference-Cited by-同舟云学术

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Tilt effect on squeeze-film damping in electrostatic micro-actuators

Published:2024-11 Issue: Volume:378 Page:115764
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Levin Peleg,Krylov Slava

Publisher

Elsevier BV

Reference16 articles.

1. Squeeze film air damping in MEMS;Bao;Sens. Actuators A Phys.,2007

2. A study of fluid squeeze-film damping;Griffin;J. Basic Eng.,1966

3. On isothermal squeeze films;Blech;J. Lubr. Technol.,1983

4. Analytical investigation of air squeeze film damping for bi-axial micro-scanner using eigenfunction expansion method;Atabak;Math. Methods Appl. Sci.,2020

5. Modeling air-damping effect in a bulk micromachined 2D tilt mirror;Hao;Sens. Actuators A Phys.,2002

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