Influence of Boundary Conditions on the Dynamic Characteristics of Squeeze Films in MEMS Devices-Reference-Cited by-同舟云学术

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Influence of Boundary Conditions on the Dynamic Characteristics of Squeeze Films in MEMS Devices

Published:2007-08 Issue:4 Volume:16 Page:893-903
ISSN:1057-7157
Container-title:Journal of Microelectromechanical Systems
language:
Short-container-title:J. Microelectromech. Syst.

Author:

Pandey A.K.,Pratap R.,Chau F.S.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Mechanical Engineering

Link

http://xplorestaging.ieee.org/ielx5/84/4285629/04285646.pdf?arnumber=4285646

Cited by 23 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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2. A TRT-LBM model of squeeze film air damping of micro-beam in the transition regime;Archive of Applied Mechanics;2021-08-05

3. Simulation study on squeeze film air damping;Micro & Nano Letters;2020-08

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5. Experimental and Theoretical Analysis of Drag Forces in Micromechanical-Beam Arrays;Physical Review Applied;2020-03-02

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