A TRT-LBM model of squeeze film air damping of micro-beam in the transition regime
Author:
Publisher
Springer Science and Business Media LLC
Subject
Mechanical Engineering
Link
https://link.springer.com/content/pdf/10.1007/s00419-021-02024-x.pdf
Reference37 articles.
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2. Fedeli, P., Frangi, A., Laghi, G., et al.: Near vacuum gas damping in MEMS: simplified modeling. J. Microelectromech. Syst. 26(3), 632–642 (2017)
3. Bao, M.H., Yang, H.: Squeeze film air damping in MEMS. Sens. Actuators A. 136(1), 3–27 (2007)
4. Blech, J.J.: On isothermal squeeze films. J. Lubr. Technol. 105, 615–620 (1983)
5. Veijola, T.: Compact models for squeeze film dampers with inertial and rarefied gas effects. J. Micromech. Microeng. 14, 1109–1118 (2004)
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