Estimation of fixed charge densities in hafnium-silicate gate dielectrics-Reference-Cited by-同舟云学术

Estimation of fixed charge densities in hafnium-silicate gate dielectrics

Published:2006-10 Issue:10 Volume:53 Page:2627-2633
ISSN:0018-9383
Container-title:IEEE Transactions on Electron Devices
language:
Short-container-title:IEEE Trans. Electron Devices

Author:

Kaushik V.S.,O'Sullivan B.J.,Pourtois G.,Van Hoornick N.,Delabie A.,Van Elshocht S.,Deweerd W.,Schram T.,Pantisano L.,Rohr E.,Ragnarsson L.-A.,De Gendt S.,Heyns M.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Link

http://xplorestaging.ieee.org/ielx5/16/35982/01705119.pdf?arnumber=1705119

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