Model of magnetically enhanced, capacitive RF discharges-Reference-Cited by-同舟云学术

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Model of magnetically enhanced, capacitive RF discharges

Published:1991-04 Issue:2 Volume:19 Page:189-196
ISSN:0093-3813
Container-title:IEEE Transactions on Plasma Science
language:
Short-container-title:IEEE Trans. Plasma Sci.

Author:

Lieberman M.A.,Lichtenberg A.J.,Savas S.E.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Condensed Matter Physics,Nuclear and High Energy Physics

Link

http://xplorestaging.ieee.org/ielx1/27/3255/00106813.pdf?arnumber=106813

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