1. Chemnitz University of Technology, Reichenhainer Str. 70, 09126, Germany
2. Angewandte Micro-Messtechnik GmbH, Volmerstr. 9 b, 12489 Berlin, Germany
3. Infineon Technologies AG, Am Campeon 1-12, 85579 Neubiberg, Germany
4. Fraunhofer Institute Electronic Nanosystems ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany