First demonstration of full integration and characterization of 4F² 1S1M cells with 45 nm of pitch and 20 nm of MTJ size-Reference-Cited by-同舟云学术

First demonstration of full integration and characterization of 4F² 1S1M cells with 45 nm of pitch and 20 nm of MTJ size

Published:2022-12-03 Issue: Volume: Page:
ISSN:
Container-title:2022 International Electron Devices Meeting (IEDM)
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Author:

Seo Soo Man¹,Aikawa Hisanori²,Kim Soo Gil¹,Nagase Toshihiko²,Ito Yuich²,Ha Tae Jung¹,Yoshino Kenichi²,Jung Bo Kyung¹,Oikawa Tadaaki²,Jung Ku Youl¹,Moon Hyun In¹,Kim Bum Su¹,Matsuoka Fumiyoshi³,Hatsuda Kosuke³,Hoya Katsuhiko³,Kim Seiyon¹,Lee Sung-Hoon¹,Na Myung-Hee¹,Cha Seon Yong¹

Affiliation:

1. SK hynix Inc.,Icheon,Korea

2. Kioxia Korea Corporation,Seoul,Korea

3. Kioxia Corporation,Yokohama,Japan

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10019319/10019320/10019549.pdf?arnumber=10019549

Reference19 articles.

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